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Nano- and Microelectromechanical Systems: Fundamentals of Nano- and Microengineering
Sergey Edward Lyshevski
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The world now stands at the brink of a technological revolution. Micro- and nanoengineering will ultimately change the very nature of most human-made structures, devices, and systems, and will lead to unprecedented breakthroughs in a wide range of applications.

For it to reach its full potential, today's engineers must understand the various methods, techniques, and technologies used to formulate, design, and optimize high-performance microelectromechanical and nanoelectromechanical systems (MEMS and NEMS). Nano- and Microelectromechanical Systems builds the theoretical foundation needed to develop, analyze, and prototype NEMS and MEMS, their components, and their structures.

It illustrates how to perform the studies and analyses of nano- and microscale processes, phenomena, and properties essential to solving a wide array of engineering problems and addresses the solution of these problems in the context of specific applications. Nano- and Microelectromechanical Systems provides the background readers need to model, design, simulate, control, implement, and deploy NEMS and MEMS. Most importantly, it prepares them to continue research in this challenging field and contribute to its further advancement.




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